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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings B J Pawlak
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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
319 pages, illustrations
| Médium | Knihy Hardcover Book (Kniha s pevnou väzbou a obalom) |
| Vydané | 17. októbra 2008 |
| ISBN13 | 9781605110400 |
| Vydavatelia | Materials Research Society |
| Strany | 319 |
| Rozmery | 152 × 228 × 23 mm · 566 g |
| Jazyk | Angličtina |
| Editor | Law, M. (University of Florida) |
| Editor | Pawlak, B. J. |
| Editor | Pelaz, M. L. (Universidad de Valladolid, Spain) |
| Editor | Surugo, K. |
