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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques.
134 pages
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | May 2, 2018 |
| ISBN13 | 9781789230307 |
| Publishers | IntechOpen |
| Pages | 134 |
| Dimensions | 251 × 176 × 17 mm · 406 g |
| Language | English |
| Editor | Thirumalai, Jagannathan |
