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Microlithography: Science and Technology Bruce W. Smith 3. vydanie
Microlithography: Science and Technology
Bruce W. Smith
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
900 pages, 570 black & white illustrations, 40 black & white tables
| Médium | Knihy Hardcover Book (Kniha s pevnou väzbou a obalom) |
| Vydané | 20. mája 2020 |
| ISBN13 | 9781439876756 |
| Vydavatelia | Taylor & Francis Inc |
| Strany | 838 |
| Rozmery | 150 × 220 × 20 mm · 1,62 kg |
| Jazyk | Angličtina |
| Editor | Smith, Bruce W. |
| Editor | Suzuki, Kazuaki |